JEVAsys RGA-5H
Laboratory pumping station for residual gas analysis
A compact UHV pumping station for the laboratory: DN63CF vacuum chamber with heated sample holder, oil-free pumping system and residual gas analyser in a 19″ benchtop housing.
The RGA-5H is an example system. Thanks to its modular design, the chamber, pumps, measurement and control modules can be adapted to your task. The price depends on the components.
Ultimate pressure
< 2·10-9 mbar
Chamber
DN63/40CF
Pumps
Scroll + turbo
Housing
19″, 6U
Features
- DN63CF vacuum chamber with integrated heated sample holder
- Stainless steel vacuum components, metal-sealed
- HiScroll 6 oil-free scroll pump and HiPace 80 turbomolecular pump
- SRS RGA200 residual gas analyser
- separate heating control for components, RGA and sample holder
- Pressure measurement with ATMION and JEVAmet VCU vacuum controller
Technical data
| Vacuum vessel | Stainless steel double cross DN63/40CF, metal-sealed |
|---|---|
| Backing vacuum | HiScroll 6 scroll pump |
| High vacuum | HiPace 80 turbomolecular pump |
| Vacuum measurement | ATMION as standard; alternatively JEVAmet IOS and PRM-16C |
| Pressure display | JEVAmet VCU-AM, alternatively VCU-BM |
| Ultimate pressure | < 2·10⁻⁹ mbar (RGA switched off) |
| Control | Pumping station control with manual operation, heating circuits with digital thermostats |
| Frame | 19″ benchtop housing, 6U, backing pump can be placed freely |
| Connections | 230 VAC, 50 Hz; nitrogen for venting 0.1 to 0.5 bar overpressure |
| Weight | Benchtop housing with pumping station approx. 40 kg, scroll pump approx. 19 kg |
Downloads
Is it right for your system?
The flange, installation depth, voltage and process determine the version. We work out with you and JEVATEC which variant fits, and also source custom versions.