Manipulators
XYZ, XY and Z manipulators, rotary and tilt stages for UHV
Manipulators move samples, probes and sources precisely in vacuum without opening the chamber. Hositrad builds them for CF flanges from CF40 to CF150.
All stages are available with micrometer screws or stepper motors. According to Hositrad, converting from manual to motor drive takes around 15 minutes and can be done on site at the customer’s.
Flanges
CF40 to CF150
XY travel
±12.5 or ±25 mm
Tilt
±2° at the top flange
Drive
manual or motor
Features
- XYZ manipulators HMA2000 (CF40), HMB1500 (CF63) and HMB2000 (CF100) with large bore
- XY tables HMC1000 (CF40), HMC1500 (CF63), HMC2000 (CF100) and HMC3000 (CF150)
- compact Z translators HBLT27S (CF40) and HBLT45S (CF63)
- Top flange tiltable by ±2°, standard at Hositrad
- Probe stations with crossed roller guides on all axes, resolution 0.002 mm
- differentially pumped rotary platforms DPRF: 360° continuous, two pumping stages, fine drive with 0.1° vernier
- McTilt tilt table for aligning probes on a point in the chamber
Technical data
| XYZ manipulators | HMA2000 (CF40), HMB1500 (CF63), HMB2000 (CF100); top flange tiltable by ±2° |
|---|---|
| XY tables | HMC1000 (CF40), HMC1500 (CF63), HMC2000 (CF100), HMC3000 (CF150) |
| XY travel | ±12.5 mm or ±25 mm, circular travel range |
| Z translators | HBLT27S (CF40), HBLT45S (CF63) |
| Probe stations | Crossed roller guides on X, Y and Z, resolution 0.002 mm, Z travel up to 50 mm |
| Rotary platforms | DPRF, 360° continuous, two differentially pumped stages with fluorocarbon seals, ball bearings, worm drive, 0.1° vernier |
| Drive | Micrometer screws or stepper motors, can be retrofitted |
Downloads
Which version is right?
The flange, material, pressure range and process determine the version. We clarify this with you and Hositrad and also source custom-made parts to drawing.