Film thickness measurement
Quartz crystal monitors, sensor heads and sensor crystals
During evaporation and sputtering, a quartz crystal measures how much material is deposited: its frequency drops as the film grows. From this, the monitor calculates the rate and film thickness.
Hositrad supplies the entire measuring chain: monitor, sensor head and crystals. The crystals also fit Maxtek, Inficon and Phelps sensor heads.
Channels
2
Resolution
0.1 or 0.01 Hz
Interface
ModBus
Sensor heads
up to 300 °C
Features
- HOQM20 quartz crystal monitor with two independent measuring channels in a compact housing
- Resolution 0.1 or 0.01 Hz, as required
- ModBus for laboratory and industry, evaluation software included
- external oscillator for long cable runs
- HTM260 film thickness monitor with temperature measurement
- Sensor heads bakeable up to 300 °C or in a flat design up to 150 °C
- Sensor crystals, also compatible with Maxtek, Inficon and Phelps
Technical data
| HOQM20 monitor | 2 channels, resolution 0.1 or 0.01 Hz, ModBus, software included |
|---|---|
| Option | external oscillator for long cable runs |
| HTM260 monitor | Film thickness monitor with temperature measurement |
| Sensor heads | bakeable up to 300 °C; flat design up to 150 °C |
| Sensor crystals | compatible with Maxtek, Inficon, Phelps and others |
Which version is right?
The flange, material, pressure range and process determine the version. We clarify this with you and Hositrad and also source custom-made parts to drawing.