Electron beam evaporators
e-Gun™ from Thermionics
Electron beam evaporators produce uniform, high-purity films and optical coatings. Hositrad represents the Thermionics e-Gun™, and we source it through Hositrad.
The beam strikes only the evaporant in the water-cooled crucible. The vapour therefore stays clean and the surroundings hardly outgas. Refractory and dielectric materials can be evaporated as well as metals and semiconductors.
Temperature
over 3,500 °C
Base pressure
down to 5·10⁻¹¹ mbar
Bakeable
up to 230 °C
Crucibles
1, 3 or 5
Features
- Beam deflected through 270° by a permanent magnet, filament shielded from the vapour
- water-cooled, grounded crucible
- Beam spot of around 3 mm at approx. 25 kW/cm²
- Beam swept electromagnetically across the material, manually or automatically
- Single, three and five-crucible sources, plus a version with linear motion
- all-metal sealed, no O-rings
- for research and production, including several sources on one flange
Technical data
| Principle | self-accelerated electron beam, tungsten filament, 270° deflection |
|---|---|
| Temperature at the material | over 3,500 °C |
| Beam spot | approx. 3 mm, approx. 25 kW/cm² |
| Crucible | water-cooled, grounded; versions with 1, 3 or 5 crucibles |
| Base pressure | down to 5·10⁻¹¹ mbar |
| Sealing | all-metal sealed, bakeable up to 230 °C |
| Beam control | electromagnetic, manual or automatic |
Which version is right?
The flange, material, pressure range and process determine the version. We clarify this with you and Hositrad and also source custom-made parts to drawing.